Publications associated to project

Project no. TF03000025 of the Technology Agency of the Czech Republic
Research and development of new plasma-activated ALD system with a unique source of low-temperature plasma based on microwave surfatron and ECWR discharge
M. Cada    (2016-2019)

Total: 2
M. Čada, Z. Hubička
Device for generating high frequency plasma discharge with electron cyclotron wave resonance

M. Čada, Z. Hubička, D. Tvarog, M. Pultar, J. Šmíd, V. Straňák, J. Olejníček, A. Poruba, J. Vaněk, L. Pečiva, P. Lukašík, J. Dolák
Surfatron plasma source for substrates up to 100 mm
(2017) -.